{
"Summary": {
  "Slices": 31,
  "InitialPositionList": [
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56039.944,
          -5028.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos0_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56318.472,
          -5028.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos0_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56597,
          -5028.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos0_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56875.528,
          -5028.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos0_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          57154.056,
          -5028.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos0_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56039.944,
          -4749.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos0_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56318.472,
          -4749.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos0_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56597,
          -4749.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos0_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56875.528,
          -4749.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos0_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          57154.056,
          -4749.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos0_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56039.944,
          -4471
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos0_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56318.472,
          -4471
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos0_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56597,
          -4471
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos0_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56875.528,
          -4471
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos0_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          57154.056,
          -4471
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos0_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56039.944,
          -4192.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos0_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56318.472,
          -4192.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos0_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56597,
          -4192.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos0_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56875.528,
          -4192.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos0_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          57154.056,
          -4192.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos0_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56039.944,
          -3913.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos0_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56318.472,
          -3913.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos0_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56597,
          -3913.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos0_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          56875.528,
          -3913.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos0_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8426.29],
        "DA Z Stage": [110],
        "XYStage": [
          57154.056,
          -3913.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos0_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          56737.944,
          933.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos1_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57016.472,
          933.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos1_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57295,
          933.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos1_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57573.528,
          933.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos1_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57852.056,
          933.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos1_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          56737.944,
          1212.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos1_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57016.472,
          1212.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos1_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57295,
          1212.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos1_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57573.528,
          1212.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos1_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57852.056,
          1212.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos1_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          56737.944,
          1491
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos1_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57016.472,
          1491
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos1_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57295,
          1491
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos1_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57573.528,
          1491
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos1_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57852.056,
          1491
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos1_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          56737.944,
          1769.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos1_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57016.472,
          1769.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos1_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57295,
          1769.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos1_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57573.528,
          1769.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos1_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57852.056,
          1769.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos1_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          56737.944,
          2048.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos1_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57016.472,
          2048.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos1_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57295,
          2048.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos1_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57573.528,
          2048.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos1_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8419.04],
        "DA Z Stage": [110],
        "XYStage": [
          57852.056,
          2048.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos1_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56459.944,
          19329.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos2_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56738.472,
          19329.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos2_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57017,
          19329.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos2_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57295.528,
          19329.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos2_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57574.056,
          19329.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos2_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56459.944,
          19608.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos2_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56738.472,
          19608.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos2_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57017,
          19608.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos2_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57295.528,
          19608.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos2_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57574.056,
          19608.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos2_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56459.944,
          19887
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos2_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56738.472,
          19887
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos2_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57017,
          19887
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos2_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57295.528,
          19887
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos2_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57574.056,
          19887
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos2_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56459.944,
          20165.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos2_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56738.472,
          20165.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos2_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57017,
          20165.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos2_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57295.528,
          20165.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos2_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57574.056,
          20165.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos2_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56459.944,
          20444.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos2_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          56738.472,
          20444.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos2_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57017,
          20444.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos2_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57295.528,
          20444.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos2_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8384.71],
        "DA Z Stage": [110],
        "XYStage": [
          57574.056,
          20444.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos2_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          56789.944,
          26393.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos3_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57068.472,
          26393.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos3_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57347,
          26393.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos3_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57625.528,
          26393.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos3_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57904.056,
          26393.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos3_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          56789.944,
          26672.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos3_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57068.472,
          26672.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos3_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57347,
          26672.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos3_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57625.528,
          26672.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos3_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57904.056,
          26672.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos3_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          56789.944,
          26951
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos3_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57068.472,
          26951
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos3_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57347,
          26951
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos3_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57625.528,
          26951
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos3_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57904.056,
          26951
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos3_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          56789.944,
          27229.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos3_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57068.472,
          27229.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos3_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57347,
          27229.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos3_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57625.528,
          27229.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos3_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57904.056,
          27229.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos3_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          56789.944,
          27508.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos3_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57068.472,
          27508.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos3_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57347,
          27508.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos3_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57625.528,
          27508.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos3_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8371.61],
        "DA Z Stage": [110],
        "XYStage": [
          57904.056,
          27508.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos3_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          64794.944,
          27725.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos4_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65073.472,
          27725.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos4_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65352,
          27725.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos4_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65630.528,
          27725.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos4_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65909.056,
          27725.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos4_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          64794.944,
          28004.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos4_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65073.472,
          28004.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos4_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65352,
          28004.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos4_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65630.528,
          28004.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos4_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65909.056,
          28004.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos4_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          64794.944,
          28283
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos4_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65073.472,
          28283
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos4_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65352,
          28283
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos4_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65630.528,
          28283
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos4_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65909.056,
          28283
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos4_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          64794.944,
          28561.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos4_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65073.472,
          28561.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos4_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65352,
          28561.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos4_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65630.528,
          28561.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos4_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65909.056,
          28561.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos4_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          64794.944,
          28840.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos4_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65073.472,
          28840.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos4_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65352,
          28840.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos4_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65630.528,
          28840.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos4_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8379.11],
        "DA Z Stage": [110],
        "XYStage": [
          65909.056,
          28840.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos4_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          64932.944,
          21470.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos5_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65211.472,
          21470.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos5_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65490,
          21470.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos5_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65768.528,
          21470.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos5_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          66047.056,
          21470.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos5_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          64932.944,
          21749.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos5_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65211.472,
          21749.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos5_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65490,
          21749.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos5_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65768.528,
          21749.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos5_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          66047.056,
          21749.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos5_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          64932.944,
          22028
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos5_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65211.472,
          22028
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos5_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65490,
          22028
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos5_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65768.528,
          22028
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos5_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          66047.056,
          22028
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos5_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          64932.944,
          22306.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos5_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65211.472,
          22306.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos5_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65490,
          22306.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos5_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65768.528,
          22306.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos5_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          66047.056,
          22306.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos5_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          64932.944,
          22585.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos5_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65211.472,
          22585.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos5_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65490,
          22585.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos5_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          65768.528,
          22585.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos5_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8387.3],
        "DA Z Stage": [110],
        "XYStage": [
          66047.056,
          22585.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos5_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          64795.944,
          3179.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos6_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65074.472,
          3179.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos6_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65353,
          3179.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos6_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65631.528,
          3179.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos6_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65910.056,
          3179.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos6_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          64795.944,
          3458.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos6_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65074.472,
          3458.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos6_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65353,
          3458.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos6_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65631.528,
          3458.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos6_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65910.056,
          3458.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos6_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          64795.944,
          3737
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos6_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65074.472,
          3737
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos6_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65353,
          3737
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos6_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65631.528,
          3737
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos6_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65910.056,
          3737
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos6_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          64795.944,
          4015.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos6_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65074.472,
          4015.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos6_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65353,
          4015.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos6_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65631.528,
          4015.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos6_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65910.056,
          4015.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos6_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          64795.944,
          4294.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos6_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65074.472,
          4294.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos6_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65353,
          4294.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos6_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65631.528,
          4294.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos6_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8415.36],
        "DA Z Stage": [110],
        "XYStage": [
          65910.056,
          4294.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos6_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64134.944,
          -2228.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos7_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64413.472,
          -2228.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos7_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64692,
          -2228.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos7_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64970.528,
          -2228.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos7_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          65249.056,
          -2228.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos7_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64134.944,
          -1949.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos7_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64413.472,
          -1949.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos7_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64692,
          -1949.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos7_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64970.528,
          -1949.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos7_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          65249.056,
          -1949.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos7_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64134.944,
          -1671
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos7_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64413.472,
          -1671
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos7_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64692,
          -1671
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos7_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64970.528,
          -1671
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos7_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          65249.056,
          -1671
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos7_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64134.944,
          -1392.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos7_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64413.472,
          -1392.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos7_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64692,
          -1392.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos7_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64970.528,
          -1392.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos7_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          65249.056,
          -1392.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos7_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64134.944,
          -1113.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos7_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64413.472,
          -1113.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos7_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64692,
          -1113.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos7_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          64970.528,
          -1113.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos7_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8425.85],
        "DA Z Stage": [110],
        "XYStage": [
          65249.056,
          -1113.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos7_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -525.056,
          -5758.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos8_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -246.528,
          -5758.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos8_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          32,
          -5758.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos8_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          310.528,
          -5758.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos8_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          589.056,
          -5758.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos8_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -525.056,
          -5479.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos8_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -246.528,
          -5479.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos8_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          32,
          -5479.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos8_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          310.528,
          -5479.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos8_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          589.056,
          -5479.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos8_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -525.056,
          -5201
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos8_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -246.528,
          -5201
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos8_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          32,
          -5201
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos8_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          310.528,
          -5201
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos8_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          589.056,
          -5201
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos8_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -525.056,
          -4922.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos8_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -246.528,
          -4922.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos8_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          32,
          -4922.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos8_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          310.528,
          -4922.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos8_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          589.056,
          -4922.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos8_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -525.056,
          -4643.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos8_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          -246.528,
          -4643.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos8_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          32,
          -4643.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos8_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          310.528,
          -4643.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos8_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8383.47],
        "DA Z Stage": [110],
        "XYStage": [
          589.056,
          -4643.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos8_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -398.056,
          95.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos9_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -119.528,
          95.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos9_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          159,
          95.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos9_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          437.528,
          95.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos9_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          716.056,
          95.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos9_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -398.056,
          374.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos9_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -119.528,
          374.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos9_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          159,
          374.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos9_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          437.528,
          374.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos9_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          716.056,
          374.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos9_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -398.056,
          653
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos9_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -119.528,
          653
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos9_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          159,
          653
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos9_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          437.528,
          653
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos9_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          716.056,
          653
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos9_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -398.056,
          931.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos9_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -119.528,
          931.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos9_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          159,
          931.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos9_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          437.528,
          931.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos9_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          716.056,
          931.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos9_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -398.056,
          1210.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos9_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          -119.528,
          1210.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos9_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          159,
          1210.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos9_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          437.528,
          1210.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos9_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8381.68],
        "DA Z Stage": [110],
        "XYStage": [
          716.056,
          1210.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos9_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          -100.056,
          19586.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos10_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          178.472,
          19586.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos10_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          457,
          19586.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos10_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          735.528,
          19586.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos10_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          1014.056,
          19586.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos10_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          -100.056,
          19865.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos10_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          178.472,
          19865.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos10_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          457,
          19865.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos10_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          735.528,
          19865.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos10_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          1014.056,
          19865.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos10_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          -100.056,
          20144
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos10_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          178.472,
          20144
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos10_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          457,
          20144
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos10_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          735.528,
          20144
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos10_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          1014.056,
          20144
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos10_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          -100.056,
          20422.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos10_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          178.472,
          20422.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos10_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          457,
          20422.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos10_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          735.528,
          20422.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos10_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          1014.056,
          20422.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos10_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          -100.056,
          20701.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos10_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          178.472,
          20701.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos10_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          457,
          20701.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos10_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          735.528,
          20701.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos10_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8368.23],
        "DA Z Stage": [110],
        "XYStage": [
          1014.056,
          20701.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos10_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          333.944,
          24663.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos11_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          612.472,
          24663.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos11_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          891,
          24663.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos11_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1169.528,
          24663.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos11_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1448.056,
          24663.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos11_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          333.944,
          24942.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos11_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          612.472,
          24942.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos11_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          891,
          24942.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos11_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1169.528,
          24942.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos11_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1448.056,
          24942.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos11_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          333.944,
          25221
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos11_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          612.472,
          25221
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos11_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          891,
          25221
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos11_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1169.528,
          25221
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos11_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1448.056,
          25221
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos11_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          333.944,
          25499.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos11_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          612.472,
          25499.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos11_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          891,
          25499.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos11_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1169.528,
          25499.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos11_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1448.056,
          25499.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos11_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          333.944,
          25778.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos11_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          612.472,
          25778.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos11_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          891,
          25778.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos11_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1169.528,
          25778.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos11_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8365.93],
        "DA Z Stage": [110],
        "XYStage": [
          1448.056,
          25778.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos11_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7428.944,
          27951.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos12_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7707.472,
          27951.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos12_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7986,
          27951.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos12_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8264.528,
          27951.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos12_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8543.056,
          27951.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos12_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7428.944,
          28230.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos12_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7707.472,
          28230.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos12_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7986,
          28230.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos12_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8264.528,
          28230.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos12_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8543.056,
          28230.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos12_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7428.944,
          28509
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos12_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7707.472,
          28509
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos12_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7986,
          28509
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos12_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8264.528,
          28509
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos12_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8543.056,
          28509
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos12_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7428.944,
          28787.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos12_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7707.472,
          28787.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos12_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7986,
          28787.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos12_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8264.528,
          28787.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos12_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8543.056,
          28787.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos12_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7428.944,
          29066.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos12_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7707.472,
          29066.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos12_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          7986,
          29066.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos12_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8264.528,
          29066.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos12_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8362.79],
        "DA Z Stage": [110],
        "XYStage": [
          8543.056,
          29066.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos12_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8346.944,
          22161.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos13_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8625.472,
          22161.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos13_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8904,
          22161.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos13_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9182.528,
          22161.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos13_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9461.056,
          22161.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos13_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8346.944,
          22440.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos13_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8625.472,
          22440.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos13_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8904,
          22440.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos13_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9182.528,
          22440.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos13_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9461.056,
          22440.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos13_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8346.944,
          22719
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos13_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8625.472,
          22719
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos13_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8904,
          22719
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos13_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9182.528,
          22719
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos13_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9461.056,
          22719
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos13_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8346.944,
          22997.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos13_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8625.472,
          22997.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos13_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8904,
          22997.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos13_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9182.528,
          22997.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos13_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9461.056,
          22997.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos13_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8346.944,
          23276.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos13_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8625.472,
          23276.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos13_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          8904,
          23276.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos13_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9182.528,
          23276.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos13_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8369.53],
        "DA Z Stage": [110],
        "XYStage": [
          9461.056,
          23276.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos13_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7541.944,
          4146.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos14_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7820.472,
          4146.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos14_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8099,
          4146.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos14_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8377.528,
          4146.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos14_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8656.056,
          4146.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos14_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7541.944,
          4425.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos14_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7820.472,
          4425.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos14_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8099,
          4425.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos14_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8377.528,
          4425.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos14_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8656.056,
          4425.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos14_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7541.944,
          4704
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos14_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7820.472,
          4704
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos14_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8099,
          4704
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos14_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8377.528,
          4704
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos14_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8656.056,
          4704
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos14_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7541.944,
          4982.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos14_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7820.472,
          4982.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos14_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8099,
          4982.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos14_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8377.528,
          4982.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos14_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8656.056,
          4982.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos14_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7541.944,
          5261.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos14_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          7820.472,
          5261.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos14_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8099,
          5261.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos14_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8377.528,
          5261.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos14_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8382.75],
        "DA Z Stage": [110],
        "XYStage": [
          8656.056,
          5261.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos14_004_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8461.944,
          -1982.056
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos15_000_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8740.472,
          -1982.056
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos15_001_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9019,
          -1982.056
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos15_002_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9297.528,
          -1982.056
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos15_003_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9576.056,
          -1982.056
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos15_004_000",
      "GridRowIndex": 0
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8461.944,
          -1703.528
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos15_000_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8740.472,
          -1703.528
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos15_001_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9019,
          -1703.528
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos15_002_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9297.528,
          -1703.528
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos15_003_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9576.056,
          -1703.528
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos15_004_001",
      "GridRowIndex": 1
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8461.944,
          -1425
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos15_000_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8740.472,
          -1425
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos15_001_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9019,
          -1425
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos15_002_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9297.528,
          -1425
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos15_003_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9576.056,
          -1425
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos15_004_002",
      "GridRowIndex": 2
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8461.944,
          -1146.472
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos15_000_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8740.472,
          -1146.472
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos15_001_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9019,
          -1146.472
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos15_002_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9297.528,
          -1146.472
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos15_003_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9576.056,
          -1146.472
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos15_004_003",
      "GridRowIndex": 3
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8461.944,
          -867.944
        ]
      },
      "GridColumnIndex": 0,
      "Label": "Pos15_000_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          8740.472,
          -867.944
        ]
      },
      "GridColumnIndex": 1,
      "Label": "Pos15_001_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9019,
          -867.944
        ]
      },
      "GridColumnIndex": 2,
      "Label": "Pos15_002_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9297.528,
          -867.944
        ]
      },
      "GridColumnIndex": 3,
      "Label": "Pos15_003_004",
      "GridRowIndex": 4
    },
    {
      "DeviceCoordinatesUm": {
        "ManualFocus": [8394.44],
        "DA Z Stage": [110],
        "XYStage": [
          9576.056,
          -867.944
        ]
      },
      "GridColumnIndex": 4,
      "Label": "Pos15_004_004",
      "GridRowIndex": 4
    }
  ],
  "Interval_ms": 0,
  "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
  "UserName": "Nikon",
  "Depth": 2,
  "PixelType": "GRAY16",
  "Time": "2019-12-16 03:28:13 -0500",
  "Date": "2019-12-16",
  "z-step_um": 1,
  "MetadataVersion": 10,
  "PositionIndex": 7,
  "SlicesFirst": true,
  "ChContrastMin": [
    0,
    0,
    0,
    0,
    0
  ],
  "Width": 2048,
  "PixelAspect": 1,
  "MicroManagerVersion": "1.4.23 20190321",
  "ROI": [
    0,
    0,
    2048,
    2048
  ],
  "ChNames": [
    "Il-G",
    "Il-T",
    "Il-A",
    "Il-C",
    "P-DIC"
  ],
  "IJType": 1,
  "GridRow": 0,
  "Comment": "",
  "Height": 2048,
  "GridColumn": 0,
  "Prefix": "geneseq_1",
  "PixelSize_um": 0.16,
  "Frames": 1,
  "CameraTimeout": 20000,
  "BitDepth": 16,
  "KeepShutterOpenChannels": false,
  "Source": "Micro-Manager",
  "Channels": 5,
  "ComputerName": "ZadorConfocal1",
  "CustomIntervals_ms": [],
  "KeepShutterOpenSlices": false,
  "ChColors": [
    -13369345,
    -256,
    -52225,
    -1,
    -1
  ],
  "TimeFirst": false,
  "ChContrastMax": [
    65536,
    65536,
    65536,
    65536,
    65536
  ],
  "Positions": 400,
  "Directory": "F:\\20191216M1cdhs"
},
"FrameKey-0-0-0": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "3652b5b5-7b0a-4740-a79d-b2e4640129b1",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 0,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 0,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 350805,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_000.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 95,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:13 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-1": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "7030b906-8815-4e60-be70-eb644af3916a",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 1,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 1,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 351082,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_001.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 96,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:14 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-2": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "8c4b8290-1824-4701-a02d-de94c4917c25",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 2,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 2,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 351359,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_002.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 97,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:14 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-3": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d1f955b1-cbe1-4127-af3b-0f12f1689502",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 3,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 3,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 351654,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_003.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 98,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:14 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-4": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d5b2ae7e-c8c3-4812-bc87-eb14504495f2",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 4,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 4,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 351930,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_004.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 99,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:14 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-5": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ec6c42e0-a915-4603-90a5-2bd115155ccf",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 5,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 5,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 352213,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_005.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 100,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:15 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-6": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "1256ede3-d7c5-4a1a-9d90-706f7a8980fa",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 6,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 6,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 352502,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_006.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 101,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:15 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-7": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "5f5bc773-dedd-40cd-9d17-2488b369d294",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 7,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 7,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 352779,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_007.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 102,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:15 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-8": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b83f5a72-fe9d-46e2-b43d-4ebe2b91a6fd",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 8,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 8,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 353060,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_008.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 103,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:16 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-9": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "6b1c02c0-ef7e-4c0b-8883-edd93fcf9fa9",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 9,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 9,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 353356,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_009.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 104,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:16 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-10": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "6b45e8d8-5d65-4464-806d-2ebacc99e73b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 10,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 10,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 353635,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_010.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 105,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:16 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-11": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "70733881-243f-4533-80e7-820198fcc4e8",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 11,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 11,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 353912,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_011.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 106,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:16 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-12": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ee710c4a-88da-4341-8137-1f26f524ac5b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 12,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 12,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 354189,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_012.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 107,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:17 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-13": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d2bc0a4e-85f8-42ed-a123-c1dc898407a3",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 13,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 13,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 354465,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_013.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 108,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:17 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-14": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "df85df3c-3988-4e53-a94c-5b22c328f98b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 14,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 14,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 354740,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_014.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 109,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:17 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-15": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 0,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "bba9d60f-a622-4269-b559-b853b72d622b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 15,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 15,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 355015,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_015.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 110,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:18 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-16": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "4b15e04e-b62d-440e-af54-4777ed268b67",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 16,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 16,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 355311,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_016.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 111,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:18 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-17": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "be0d36bf-fe2d-493b-a908-c8e0cfb704b3",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 17,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 17,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 355589,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_017.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 112,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:18 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-18": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "dba6a8d0-580c-4428-870c-943b89eb8a1b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 18,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 18,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 355867,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_018.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 113,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:18 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-19": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "0f8a51a5-4831-4c0a-9519-14ee354c29c2",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 19,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 19,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 356142,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_019.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 114,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:19 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-20": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "62e5bce5-65c3-40e2-92d2-17a6e2c98478",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 20,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 20,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 356432,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_020.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 115,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:19 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-21": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "97ffa2fc-9729-4cb8-8710-d0436b3141af",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 21,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 21,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 356709,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_021.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 116,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:19 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-22": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "9dd46d30-dc09-467d-a92c-f5704044039f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 22,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 22,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 356984,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_022.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 117,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:20 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-23": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "6206c649-e45f-49d2-9b84-34991f2ce243",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 23,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 23,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 357260,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_023.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 118,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:20 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-24": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "9feb4046-8bac-4f84-815f-b32c55320e4a",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 24,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 24,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 357536,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_024.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 119,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:20 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-25": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "3a9be5b4-8bb5-41d3-9c05-4f5ecc99277a",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 25,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 25,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 357814,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_025.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 120,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:20 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-26": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "dcd971bb-947b-41c4-a8c7-be18324ba22b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 26,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 26,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 358094,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_026.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 121,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:21 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-27": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "71943559-dffe-4b04-8131-b5c186131521",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 27,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 27,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 358371,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_027.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 122,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:21 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-28": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "18611e34-e0ad-45a4-810e-b5f31e0bd26d",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 28,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 28,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 358655,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_028.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 123,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:21 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-29": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "4eafc1fc-2794-49c6-8910-064782dbc1df",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 29,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 29,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 358936,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_029.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 124,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:21 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-0-30": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "4.5000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 190,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ee5bb0a9-ccf1-43e1-9b68-85d81f78f2bd",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "CFP/YFP",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "565/24",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "5.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 30,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 30,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "520",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 359213,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "190.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-G_030.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 125,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-G",
  "XLIGHT Excitation Wheel-Label": "CFP/YFP",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:22 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 0,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-0": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b1596370-b9ec-44c4-86b4-aa404b47ca24",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 0,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 0,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 360131,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_000.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 95,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:23 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-1": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "41058083-6783-4c47-9a40-793465bbc4aa",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 1,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 1,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 360317,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_001.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 96,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:23 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-2": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "73199fc0-6bc3-4563-886a-7ddcdd7b03ba",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 2,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 2,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 360485,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_002.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 97,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:23 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-3": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "dd53a9c6-fa38-4a0d-9388-a903130a17d5",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 3,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 3,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 360653,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_003.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 98,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:23 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-4": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "bcb2babf-ca2b-491b-b908-2ccd35da5436",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 4,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 4,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 360819,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_004.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 99,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:23 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-5": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "6426f41b-cf2e-4d84-b97e-a7c4ca8eed60",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 5,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 5,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 360990,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_005.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 100,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:24 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-6": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "11cb750b-804a-45ec-8b35-ebc2d1fd3866",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 6,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 6,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 361158,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_006.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 101,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:24 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-7": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "60721970-1717-4b3c-bf1a-4b29c31d722e",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 7,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 7,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 361324,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_007.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 102,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:24 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-8": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "f9e1cacb-838f-4a7c-bd20-d4eaa3fdb98a",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 8,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 8,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 361490,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_008.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 103,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:24 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-9": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "33127fdc-c75b-4e94-9e77-657ae37ae86c",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 9,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 9,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 361685,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_009.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 104,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:24 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-10": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "7460c68e-2828-460c-8ace-f3e2c3bb67fe",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 10,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 10,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 361866,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_010.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 105,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:24 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-11": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d469c0d1-38b5-41fb-ad05-d815a0d2f9d2",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 11,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 11,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 362032,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_011.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 106,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:25 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-12": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "5fd6703b-1424-4ab0-a522-6368c1d60486",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 12,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 12,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 362198,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_012.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 107,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:25 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-13": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b5fe8c40-0b5d-4104-8707-da78751091e6",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 13,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 13,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 362365,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_013.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 108,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:25 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-14": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "00bd14e4-f4d9-429b-a856-2d5460ce2ccd",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 14,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 14,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 362534,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_014.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 109,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:25 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-15": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 0,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "bdc34053-806d-4d72-aaa9-9b0c4f065da0",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 15,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 15,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 362704,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_015.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 110,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:25 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-16": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "9d07ef58-cc70-478f-be68-2662a09a5f59",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 16,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 16,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 362871,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_016.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 111,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:25 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-17": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ea0ab03d-8626-469a-92fa-54bc7272d066",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 17,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 17,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 363037,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_017.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 112,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:26 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-18": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "9190c714-d926-4289-8191-1e71081bee87",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 18,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 18,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 363218,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_018.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 113,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:26 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-19": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "c6fb89d3-2f68-42f9-a7ad-9385ef13bd4a",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 19,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 19,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 363385,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_019.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 114,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:26 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-20": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ab26feb2-faca-4655-b1d2-97ea53d90166",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 20,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 20,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 363551,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_020.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 115,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:26 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-21": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b285d5c2-62db-4719-9367-64248a48732d",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 21,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 21,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 363717,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_021.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 116,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:26 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-22": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "49ba3a2f-34e7-4d17-b9f4-380ed8e13229",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 22,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 22,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 363886,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_022.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 117,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:26 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-23": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "80ac66ab-68c0-4bbf-b95c-81914d0e9b89",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 23,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 23,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 364056,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_023.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 118,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:27 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-24": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "fdbf7cc2-4690-4de6-9377-01fc0f3b110b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 24,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 24,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 364225,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_024.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 119,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:27 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-25": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "f619f396-4725-4b7a-b2da-3de93f2cbc96",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 25,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 25,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 364390,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_025.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 120,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:27 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-26": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "9f12e95b-7045-4161-9822-97c55259ec49",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 26,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 26,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 364557,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_026.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 121,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:27 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-27": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "f453632b-d6ed-48f1-9b1b-3b24ba32250b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 27,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 27,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 364732,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_027.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 122,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:27 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-28": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "0968dea5-2779-414c-a3a2-9491b7bd69a6",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 28,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 28,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 364906,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_028.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 123,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:27 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-29": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ef187e94-9bc6-4973-9108-bcfad1333024",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 29,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 29,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 365074,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_029.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 124,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:28 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-1-30": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 80,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "fe0675cf-bc55-4fef-bc92-44e9000a130e",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "585/11",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 30,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 30,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "555",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 365242,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "80.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-T_030.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 125,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-T",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:28 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 1,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "4.5000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "5.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-0": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "da32d095-496e-455e-b3ae-07b2c7088804",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 0,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 0,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 366211,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_000.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 95,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:29 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-1": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "c7c85d6a-fc7c-4851-9b85-adaf3faa0d9b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 1,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 1,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 366477,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_001.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 96,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:29 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-2": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d9558c3b-f5ec-4089-9a8d-94a8eb0f67ea",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 2,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 2,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 366743,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_002.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 97,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:29 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-3": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "c1f8a323-7bc7-417f-95b7-a3a2b24f01ea",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 3,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 3,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 367010,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_003.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 98,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:30 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-4": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ba4cacd2-d24c-454d-8ea1-f99ea08bd597",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 4,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 4,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 367275,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_004.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 99,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:30 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-5": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "23fe8d1e-036b-4617-80a1-882e7f922064",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 5,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 5,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 367541,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_005.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 100,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:30 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-6": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "5e60b79f-62ee-40f8-9995-a1e6372a324e",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 6,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 6,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 367810,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_006.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 101,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:30 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-7": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "25ddce4a-8533-4d08-b187-e78499c47355",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 7,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 7,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 368079,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_007.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 102,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:31 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-8": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "1ac95d56-44e5-464a-a93f-e64d0ecbe3a5",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 8,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 8,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 368352,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_008.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 103,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:31 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-9": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e01b6f98-168b-42bf-a80a-b6f066dcb99c",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 9,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 9,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 368617,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_009.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 104,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:31 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-10": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "db55ffec-649d-4219-b2fb-c2bac0f9a7cc",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 10,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 10,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 368894,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_010.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 105,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:31 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-11": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e8e57e7d-f57f-4fca-9abf-e614c1edf28a",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 11,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 11,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 369186,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_011.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 106,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:32 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-12": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "091a1945-35f5-4b63-858a-3a4b8149f6b1",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 12,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 12,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 369452,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_012.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 107,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:32 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-13": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e5b984b7-ed50-4a35-8a98-912e3b8097cf",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 13,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 13,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 369717,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_013.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 108,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:32 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-14": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "a7170fd5-50b0-477a-84ad-9f3dd1352f52",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 14,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 14,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 369984,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_014.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 109,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:33 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-15": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 0,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "209ce90d-26fa-4b3e-afcf-eb7b841e5942",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 15,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 15,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 370249,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_015.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 110,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:33 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-16": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "04ccd651-0692-40f3-aadd-64608ade8ddf",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 16,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 16,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 370517,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_016.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 111,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:33 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-17": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ffb540d9-b95f-4637-ac3a-1fb289a47e6f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 17,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 17,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 370785,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_017.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 112,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:33 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-18": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "bae4efcc-a47a-4f9b-83e1-969b4a4fd74a",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 18,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 18,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 371052,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_018.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 113,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:34 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-19": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "8b18305c-c09b-425a-8df6-69fee221a715",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 19,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 19,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 371336,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_019.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 114,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:34 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-20": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b70c54a6-d5bc-4b7f-9425-b1903f77065c",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 20,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 20,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 371604,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_020.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 115,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:34 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-21": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "c4d7161f-67a5-468b-bd6b-d926748b183a",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 21,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 21,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 371872,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_021.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 116,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:34 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-22": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "1371bbde-631c-4574-a5b9-3ff480045318",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 22,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 22,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 372141,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_022.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 117,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:35 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-23": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "4d2426de-a6d5-47a7-8f04-ad10ccc30661",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 23,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 23,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 372409,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_023.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 118,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:35 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-24": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "96243b3e-5edc-433b-85f6-1c409ac1b7e1",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 24,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 24,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 372675,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_024.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 119,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:35 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-25": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e23df344-8311-40f3-82f3-33576f1d9fd5",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 25,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 25,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 372943,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_025.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 120,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:36 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-26": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "caf71cb7-6a5d-4914-9880-cede61005ab5",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 26,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 26,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 373221,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_026.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 121,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:36 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-27": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "0b2e0177-6e6b-4641-ba33-67266fcb5b45",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 27,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 27,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 373490,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_027.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 122,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:36 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-28": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "134c1b67-ac19-48fe-9edb-3136bb8f5682",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 28,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 28,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 373756,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_028.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 123,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:36 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-29": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "1c758389-fdfd-407c-9a80-028598823d12",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 29,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 29,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 374022,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_029.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 124,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:37 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-2-30": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 180,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "f2d654c5-3803-40d8-8c4c-535ebf2b9486",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "676/29",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 30,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 30,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 374287,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "180.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-A_030.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 125,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-A",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:37 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 2,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-0": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "554ff1a6-3250-4238-a1b8-5416d8879cb1",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 0,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 0,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 374914,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_000.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 95,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:37 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-1": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "71971562-8aef-4a91-b0ba-622bc40fbaea",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 1,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 1,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 375250,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_001.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 96,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:38 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-2": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "faa8958a-8e3a-4b78-9f98-80cf0eec3205",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 2,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 2,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 375587,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_002.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 97,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:38 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-3": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "c3bd93ce-3f53-4d66-9f67-61c06712400f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 3,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 3,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 375927,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_003.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 98,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:38 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-4": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "fe3ea866-0119-4384-ae22-2c27cafc8050",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 4,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 4,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 376266,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_004.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 99,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:39 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-5": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e82a536f-28c3-4f13-89d9-19958023b656",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 5,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 5,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 376603,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_005.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 100,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:39 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-6": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "0ffdddad-951d-477f-ab28-5344a062a2d2",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 6,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 6,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 376938,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_006.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 101,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:40 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-7": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "fd4f7769-e8eb-4b4b-8e8b-bb5ba83cd972",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 7,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 7,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 377275,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_007.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 102,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:40 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-8": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "5a07f08e-4747-44b4-99bf-5a73ffff8466",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 8,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 8,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 377615,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_008.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 103,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:40 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-9": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "592f7b35-5cac-4fb6-a2b4-916f031ab2e1",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 9,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 9,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 377951,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_009.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 104,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:41 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-10": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "f26018e7-ea82-4b01-bcf4-393a182b1ba9",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 10,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 10,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 378289,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_010.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 105,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:41 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-11": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "4a586556-3195-441a-bff2-2c2182377b48",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 11,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 11,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 378626,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_011.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 106,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:41 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-12": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e743e662-0573-45cb-9780-b48b04f490a3",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 12,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 12,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 378966,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_012.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 107,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:42 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-13": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "0e6aa402-3dd4-4220-8f46-dce8f0651f9d",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 13,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 13,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 379302,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_013.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 108,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:42 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-14": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "6d12deb5-0222-4966-9e64-c13c80472c02",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 14,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 14,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 379639,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_014.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 109,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:42 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-15": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 0,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ee637e9e-b666-4782-a610-2b360148b020",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 15,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 15,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 379975,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_015.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 110,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:43 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-16": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "aee9ae1c-26e2-4d31-b678-bd7ce27cbb79",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 16,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 16,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 380314,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_016.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 111,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:43 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-17": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "6780f8df-f2ae-45dd-85da-9443fcae1def",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 17,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 17,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 380651,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_017.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 112,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:43 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-18": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "a8e76b34-1b45-488a-8ca6-fd878cfdbeb8",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 18,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 18,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 381001,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_018.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 113,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:44 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-19": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "631cf4cd-8212-474d-86bb-ffc627f5fd74",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 19,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 19,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 381339,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_019.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 114,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:44 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-20": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "24f4fb85-6ea1-4f0f-9c58-9990753f256d",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 20,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 20,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 381677,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_020.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 115,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:44 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-21": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "03f4e3b6-691e-4618-99b5-fc80a85f485c",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 21,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 21,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 382013,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_021.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 116,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:45 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-22": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "45463962-db40-4df3-99c1-f591389749cb",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 22,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 22,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 382350,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_022.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 117,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:45 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-23": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "5f572032-8060-44a7-a6d7-24393771f01a",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 23,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 23,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 382700,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_023.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 118,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:45 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-24": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b42da371-5c32-43a5-8688-a4668b78d62b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 24,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 24,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 383037,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_024.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 119,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:46 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-25": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "cc0ed410-bcf3-436c-9669-6f201f0c951d",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 25,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 25,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 383373,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_025.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 120,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:46 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-26": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e2f9b725-7eb0-40b8-abf7-a380f08166f6",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 26,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 26,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 383709,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_026.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 121,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:46 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-27": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "91383456-5034-4971-b3c5-d7a138472510",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 27,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 27,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 384046,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_027.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 122,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:47 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-28": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "66619384-d67c-4967-a342-a274efdf1978",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 28,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 28,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 384382,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_028.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 123,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:47 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-29": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "7b6880f9-9cb2-46e1-9865-dbda6ca99b04",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 29,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 29,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 384718,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_029.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 124,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:47 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-3-30": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 250,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "f589ba97-db83-45ba-a1bc-272d2e1e3e84",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "FF652-Di01",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "725/40",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 30,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 30,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "640",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 385054,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "250.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "5.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_Il-C_030.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 125,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "Il-C",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:48 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 3,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "4.5000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-0": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ed67c891-07d3-4267-8f6b-eec67b2f620e",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 0,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 0,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 386170,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_000.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 95,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:49 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-1": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "3277841b-bca3-4719-af10-a0c451109c8b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 1,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 1,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 386618,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_001.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 96,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:49 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-2": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "c9d6411c-8931-4505-ba0a-3a47bb4794a5",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 2,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 2,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 387049,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_002.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 97,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:50 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-3": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ea30c1d6-bbb4-4b26-af87-72d4c7d32321",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 3,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 3,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 387479,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_003.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 98,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:50 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-4": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "504d154f-d527-42b1-99fa-3050f757aca9",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 4,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 4,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 387911,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_004.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 99,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:50 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-5": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "40e0ac53-fb76-4507-b35c-f77058780858",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 5,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 5,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 388361,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_005.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 100,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:51 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-6": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "3447eb49-888b-4173-a427-984e0fab959b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 6,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 6,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 388792,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_006.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 101,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:51 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-7": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "761aaf6c-09ff-4dab-8641-3e0d54b3e609",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 7,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 7,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 389208,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_007.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 102,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:52 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-8": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "91e1f23e-56ab-41c4-9a53-ca0e6bce9475",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 8,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 8,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 389655,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_008.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 103,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:52 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-9": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e817a98d-1cc0-4c2d-8b1c-97eaaae6d1a7",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 9,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 9,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 390104,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_009.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 104,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:53 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-10": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "17d3c2d1-e5a3-4ac2-886b-3bebc946067c",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 10,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 10,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 390535,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_010.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 105,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:53 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-11": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "fbbfcce8-f1f9-4c1b-9ca2-2f39c9782377",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 11,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 11,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 390953,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_011.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 106,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:54 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-12": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ec160e22-4f17-452d-ba85-a48bd4c7ec72",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 12,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 12,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 391398,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_012.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 107,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:54 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-13": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "ddf20f74-2166-4e54-8adc-3ad2efa659ec",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 13,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 13,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 391831,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_013.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 108,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:54 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-14": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": -1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "44bd3c95-f7fe-4938-b69d-1118574e763a",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 14,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 14,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 392248,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_014.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 109,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:55 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-15": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 0,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "027a1302-2fdd-4174-896c-7f75b5d2ff72",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 15,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 15,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 392680,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_015.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 110,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:55 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-16": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 1,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "9a9389ba-6ec3-4ef1-bcb4-299a076530d8",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 16,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 16,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 393110,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_016.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 111,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:56 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-17": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 2,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "d19f31c6-1294-4ae7-a7c2-18e78ce3334f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 17,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 17,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 393543,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_017.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 112,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:56 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-18": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 3,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "e9ac4965-5ce1-4ca6-a3c7-ec5beaf8d7cb",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 18,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 18,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 393991,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_018.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 113,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:57 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-19": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 4,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "9faacada-4354-46e1-a253-1c028ffd8384",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 19,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 19,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 394423,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_019.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 114,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:57 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-20": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 5,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "fb337fec-a655-4ecd-a2c5-aeda8d55949f",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 20,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 20,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 394856,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_020.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 115,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:57 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-21": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 6,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "a05b5510-350f-40e5-8739-37089ae23b14",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 21,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 21,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 395270,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_021.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 116,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:58 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-22": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 7,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "f2aaf275-8c48-4530-b2e9-0def35a8e8d9",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 22,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 22,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 395685,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_022.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 117,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:58 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-23": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 8,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "2f0d4746-2648-4839-96e4-ab6d1646bf26",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 23,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 23,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 396118,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_023.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 118,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:59 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-24": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 9,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "b0c73a7e-8b85-4d0d-83a1-585912378897",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 24,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 24,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 396549,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_024.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 119,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:28:59 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-25": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 10,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "3bc45d5b-09a3-4583-b2d6-17b8ca7416fe",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 25,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 25,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 396967,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_025.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 120,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:29:00 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-26": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 11,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "3d9844cf-8c84-475e-a46f-679ef216534b",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 26,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 26,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 397415,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_026.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 121,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:29:00 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-27": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 12,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "aed545f5-29c6-4136-a31d-021db95f43cc",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 27,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 27,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 397846,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_027.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 122,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:29:00 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-28": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 13,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "0521e52c-819f-4f7a-bd0a-eacad0973276",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 28,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 28,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 398293,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_028.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 123,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:29:01 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-29": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 14,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "c81fd980-57c2-4dfb-8b09-b2b9bc845a40",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 29,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 29,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 398726,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_029.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 124,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:29:01 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
},
"FrameKey-0-4-30": {
  "Objective-Name": "Objective",
  "Condenser-Name": "Condenser",
  "Core-Initialize": "1",
  "405-DA Device": "405 Shutter",
  "470 Shutter-Block voltage": "false",
  "555-Name": "DA Shutter",
  "640 AO-Demo": "No",
  "405 Shutter-MaxVolts": "5.0000",
  "ManualFocus-Name": "ManualFocus",
  "470-Name": "DA Shutter",
  "520 AO-Volts": "0.0000",
  "ROI": "0-0-2048-2048",
  "520 AO-Description": "NI DAC",
  "Prime BSI-PP  2   THRESHOLD": "120",
  "Prime BSI-Port": "CMOS",
  "555 Shutter-MaxVolts": "5.0000",
  "470 AO-Description": "NI DAC",
  "470-State": "0",
  "LudlShutter-Description": "Ludl shutter adapter",
  "Prime BSI-PP  5   NO OF ITERATIONS": "2",
  "SlicePosition": 15,
  "Prime BSI-CCDTemperatureSetPoint": "-20.0000",
  "640 Shutter-TriggerSampleRate": "100000",
  "Exposure-ms": 10,
  "405 AO-MaxVolts": "5.0000",
  "COM6-DelayBetweenCharsMs": "0.0000",
  "Prime BSI-PP  4 DENOISING": "DENOISING",
  "640-Description": "DA device that is used as a shutter",
  "445 Shutter-Volts": "0.0000",
  "XLIGHT Disk slider-Description": "XLIGHT Disk slider",
  "640 AO-Sequenceable": "1",
  "405-Description": "DA device that is used as a shutter",
  "445-DA Device": "445 Shutter",
  "PI AO-Demo": "No",
  "470 AO-MinVolts": "0.0000",
  "LudlShutter-LudlShutterNumber": "1",
  "555 Shutter-MinVolts": "0.0000",
  "Prime BSI-FanSpeedSetpoint": "High",
  "405 AO-MinVolts": "0.0000",
  "AxisPositions": null,
  "DA Z Stage-Stage Low Voltage": "0.0000",
  "Prime BSI-Name": "PMPCIECam00",
  "Prime BSI-FTCapable": "No",
  "XLIGHT Spin motor-Description": "XLIGHT Disk spin motor",
  "520 Shutter-AutoDetectedOutputPort": "Dev1/ao10",
  "520 AO-TriggerInputLine": "/Dev1/PFI0",
  "PI AO-TriggerSequenceLength": "1000",
  "555 Shutter-AutoDetectedOutputPort": "Dev1/ao12",
  "XYStage-Port": "COM4",
  "XYStage-MaxSpeed": "100",
  "445 Shutter-IOChannel": "Dev1/ao8",
  "Prime BSI-PP  5 QUANTVIEW": "QUANTVIEW",
  "Prime BSI-CCDTemperature": "-19.7000",
  "Prime BSI-SMARTStreamingEnabled": "No",
  "Objective-ClosedPosition": "",
  "640 Shutter-IOChannel": "Dev1/ao13",
  "520 AO-TriggerSequenceLength": "1000",
  "528 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-ShutterMode": "Pre-Exposure",
  "445-Description": "DA device that is used as a shutter",
  "445-Name": "DA Shutter",
  "COM3-Handshaking": "Off",
  "405 AO-Description": "NI DAC",
  "520-State": "0",
  "UUID": "279e56cf-2773-48db-ba12-42b3a61b0ee8",
  "Core-Camera": "Prime BSI",
  "Core-SLM": "",
  "528 AO-Block voltage": "false",
  "470 Shutter-MinVolts": "0.0000",
  "XLIGHT Disk slider-State": "1",
  "Core-ChannelGroup": "Channels1",
  "PositionIndex": 7,
  "WaitInterval": null,
  "XLIGHT Disk slider-Label": "Disk Pos50um",
  "DA Z Stage-Name": "DA Z Stage",
  "555-DA Device": "555 Shutter",
  "Prime BSI-X-dimension": "2048",
  "470 AO-MaxVolts": "5.0000",
  "445 Shutter-Demo": "No",
  "Prime BSI-CircularBufferFrameRecovery": "OFF",
  "445 AO-TriggerSampleRate": "100000",
  "Prime BSI-PVCAM Adapter Version": "1.3.39",
  "528 AO-Description": "NI DAC",
  "470 Shutter-SupportsTriggering": "0",
  "528 AO-MinVolts": "0.0000",
  "528 Shutter-Sequenceable": "1",
  "470 AO-TriggerSequenceLength": "1000",
  "520 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-PP  4   THRESHOLD": "85",
  "Summary": {
    "Slices": 31,
    "InitialPositionList": [
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -5028.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -5028.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -5028.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -5028.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -5028.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4749.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4749.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4749.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4749.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4749.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4471
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4471
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4471
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4471
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4471
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -4192.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -4192.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -4192.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -4192.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -4192.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56039.944,
            -3913.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos0_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56318.472,
            -3913.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos0_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56597,
            -3913.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos0_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            56875.528,
            -3913.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos0_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8426.29],
          "DA Z Stage": [110],
          "XYStage": [
            57154.056,
            -3913.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos0_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            933.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            933.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            933.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            933.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            933.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1212.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1212.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1212.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1212.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1212.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1491
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1491
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1491
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1491
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1491
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            1769.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            1769.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            1769.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            1769.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            1769.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            56737.944,
            2048.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos1_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57016.472,
            2048.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos1_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57295,
            2048.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos1_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57573.528,
            2048.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos1_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8419.04],
          "DA Z Stage": [110],
          "XYStage": [
            57852.056,
            2048.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos1_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19329.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19329.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19329.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19329.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19329.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19608.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19608.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19608.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19608.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19608.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            19887
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            19887
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            19887
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            19887
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            19887
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20165.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20165.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20165.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20165.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20165.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56459.944,
            20444.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos2_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            56738.472,
            20444.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos2_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57017,
            20444.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos2_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57295.528,
            20444.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos2_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8384.71],
          "DA Z Stage": [110],
          "XYStage": [
            57574.056,
            20444.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos2_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26393.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26393.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26393.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26393.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26393.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26672.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26672.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26672.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26672.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26672.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            26951
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            26951
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            26951
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            26951
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            26951
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27229.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27229.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27229.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27229.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27229.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            56789.944,
            27508.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos3_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57068.472,
            27508.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos3_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57347,
            27508.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos3_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57625.528,
            27508.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos3_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8371.61],
          "DA Z Stage": [110],
          "XYStage": [
            57904.056,
            27508.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos3_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            27725.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            27725.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            27725.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            27725.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            27725.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28004.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28004.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28004.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28004.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28004.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28283
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28283
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28283
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28283
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28283
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28561.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28561.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28561.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28561.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28561.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            64794.944,
            28840.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos4_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65073.472,
            28840.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos4_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65352,
            28840.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos4_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65630.528,
            28840.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos4_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8379.11],
          "DA Z Stage": [110],
          "XYStage": [
            65909.056,
            28840.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos4_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21470.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21470.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21470.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21470.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21470.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            21749.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            21749.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            21749.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            21749.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            21749.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22028
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22028
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22028
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22028
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22028
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22306.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22306.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22306.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22306.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22306.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            64932.944,
            22585.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos5_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65211.472,
            22585.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos5_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65490,
            22585.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos5_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            65768.528,
            22585.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos5_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8387.3],
          "DA Z Stage": [110],
          "XYStage": [
            66047.056,
            22585.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos5_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3179.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3179.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3179.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3179.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3179.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3458.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3458.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3458.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3458.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3458.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            3737
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            3737
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            3737
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            3737
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            3737
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4015.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4015.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4015.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4015.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4015.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            64795.944,
            4294.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos6_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65074.472,
            4294.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos6_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65353,
            4294.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos6_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65631.528,
            4294.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos6_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8415.36],
          "DA Z Stage": [110],
          "XYStage": [
            65910.056,
            4294.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos6_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -2228.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -2228.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -2228.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -2228.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -2228.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1949.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1949.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1949.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1949.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1949.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1671
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1671
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1671
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1671
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1671
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1392.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1392.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1392.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1392.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1392.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64134.944,
            -1113.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos7_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64413.472,
            -1113.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos7_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64692,
            -1113.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos7_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            64970.528,
            -1113.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos7_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8425.85],
          "DA Z Stage": [110],
          "XYStage": [
            65249.056,
            -1113.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos7_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5758.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5758.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5758.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5479.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5479.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5479.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -5201
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -5201
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -5201
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -5201
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -5201
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4922.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4922.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4922.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -525.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos8_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            -246.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos8_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            32,
            -4643.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos8_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            310.528,
            -4643.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos8_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8383.47],
          "DA Z Stage": [110],
          "XYStage": [
            589.056,
            -4643.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos8_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            95.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            95.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            95.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            95.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            95.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            374.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            374.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            374.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            374.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            374.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            653
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            653
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            653
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            653
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            653
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            931.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            931.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            931.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            931.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            931.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -398.056,
            1210.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos9_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            -119.528,
            1210.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos9_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            159,
            1210.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos9_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            437.528,
            1210.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos9_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8381.68],
          "DA Z Stage": [110],
          "XYStage": [
            716.056,
            1210.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos9_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19586.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19586.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19586.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19586.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19586.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            19865.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            19865.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            19865.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            19865.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            19865.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20144
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20144
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20144
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20144
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20144
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20422.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20422.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20422.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20422.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20422.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            -100.056,
            20701.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos10_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            178.472,
            20701.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos10_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            457,
            20701.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos10_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            735.528,
            20701.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos10_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8368.23],
          "DA Z Stage": [110],
          "XYStage": [
            1014.056,
            20701.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos10_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24663.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24663.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24663.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24663.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24663.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            24942.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            24942.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            24942.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            24942.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            24942.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25221
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25221
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25221
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25221
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25221
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25499.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25499.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25499.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25499.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25499.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            333.944,
            25778.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos11_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            612.472,
            25778.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos11_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            891,
            25778.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos11_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1169.528,
            25778.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos11_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8365.93],
          "DA Z Stage": [110],
          "XYStage": [
            1448.056,
            25778.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos11_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            27951.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            27951.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            27951.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            27951.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            27951.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28230.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28230.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28230.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28230.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28230.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28509
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28509
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28509
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28509
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28509
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            28787.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            28787.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            28787.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            28787.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            28787.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7428.944,
            29066.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos12_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7707.472,
            29066.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos12_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            7986,
            29066.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos12_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8264.528,
            29066.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos12_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8362.79],
          "DA Z Stage": [110],
          "XYStage": [
            8543.056,
            29066.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos12_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22161.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22161.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22161.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22161.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22161.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22440.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22440.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22440.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22440.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22440.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22719
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22719
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22719
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22719
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22719
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            22997.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            22997.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            22997.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            22997.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            22997.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8346.944,
            23276.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos13_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8625.472,
            23276.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos13_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            8904,
            23276.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos13_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9182.528,
            23276.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos13_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8369.53],
          "DA Z Stage": [110],
          "XYStage": [
            9461.056,
            23276.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos13_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4146.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4146.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4146.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4146.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4146.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4425.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4425.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4425.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4425.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4425.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4704
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4704
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4704
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4704
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4704
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            4982.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            4982.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            4982.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            4982.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            4982.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7541.944,
            5261.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos14_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            7820.472,
            5261.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos14_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8099,
            5261.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos14_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8377.528,
            5261.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos14_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8382.75],
          "DA Z Stage": [110],
          "XYStage": [
            8656.056,
            5261.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos14_004_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1982.056
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1982.056
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1982.056
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1982.056
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1982.056
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_000",
        "GridRowIndex": 0
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1703.528
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1703.528
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1703.528
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1703.528
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1703.528
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_001",
        "GridRowIndex": 1
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1425
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1425
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1425
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1425
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1425
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_002",
        "GridRowIndex": 2
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -1146.472
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -1146.472
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -1146.472
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -1146.472
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -1146.472
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_003",
        "GridRowIndex": 3
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8461.944,
            -867.944
          ]
        },
        "GridColumnIndex": 0,
        "Label": "Pos15_000_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            8740.472,
            -867.944
          ]
        },
        "GridColumnIndex": 1,
        "Label": "Pos15_001_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9019,
            -867.944
          ]
        },
        "GridColumnIndex": 2,
        "Label": "Pos15_002_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9297.528,
            -867.944
          ]
        },
        "GridColumnIndex": 3,
        "Label": "Pos15_003_004",
        "GridRowIndex": 4
      },
      {
        "DeviceCoordinatesUm": {
          "ManualFocus": [8394.44],
          "DA Z Stage": [110],
          "XYStage": [
            9576.056,
            -867.944
          ]
        },
        "GridColumnIndex": 4,
        "Label": "Pos15_004_004",
        "GridRowIndex": 4
      }
    ],
    "Interval_ms": 0,
    "UUID": "27e868c5-d57a-4f78-aeda-d43f304e7159",
    "UserName": "Nikon",
    "Depth": 2,
    "PixelType": "GRAY16",
    "Time": "2019-12-16 03:28:13 -0500",
    "Date": "2019-12-16",
    "z-step_um": 1,
    "MetadataVersion": 10,
    "PositionIndex": 7,
    "SlicesFirst": true,
    "ChContrastMin": [
      0,
      0,
      0,
      0,
      0
    ],
    "Width": 2048,
    "PixelAspect": 1,
    "MicroManagerVersion": "1.4.23 20190321",
    "ROI": [
      0,
      0,
      2048,
      2048
    ],
    "ChNames": [
      "Il-G",
      "Il-T",
      "Il-A",
      "Il-C",
      "P-DIC"
    ],
    "IJType": 1,
    "GridRow": 0,
    "Comment": "",
    "Height": 2048,
    "GridColumn": 0,
    "Prefix": "geneseq_1",
    "PixelSize_um": 0.16,
    "Frames": 1,
    "CameraTimeout": 20000,
    "BitDepth": 16,
    "KeepShutterOpenChannels": false,
    "Source": "Micro-Manager",
    "Channels": 5,
    "ComputerName": "ZadorConfocal1",
    "CustomIntervals_ms": [],
    "KeepShutterOpenSlices": false,
    "ChColors": [
      -13369345,
      -256,
      -52225,
      -1,
      -1
    ],
    "TimeFirst": false,
    "ChContrastMax": [
      65536,
      65536,
      65536,
      65536,
      65536
    ],
    "Positions": 400,
    "Directory": "F:\\20191216M1cdhs"
  },
  "Source": "Prime BSI",
  "PI AO-SupportsTriggering": "0",
  "Prime BSI-PVCAM Version": "3.8.0",
  "XLIGHT Dichroic-Label": "QUAD",
  "COM4-StopBits": "1",
  "555 Shutter-TriggerSampleRate": "100000",
  "Prime BSI-PP  2 DESPECKLE DARK LOW": "DESPECKLE DARK LOW",
  "445 AO-MaxVolts": "5.0000",
  "405 AO-AutoDetectedOutputPort": "Dev1/ao0",
  "TransmittedLamp-Description": "",
  "640 Shutter-Name": "AnalogIO",
  "FilterTurretOLYMPUS-Name": "FilterCube",
  "555 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-MaxVolts": "5.0000",
  "COM4-DelayBetweenCharsMs": "0.0000",
  "LightPath-State": "1",
  "520 Shutter-MaxVolts": "5.0000",
  "470 Shutter-MaxVolts": "5.0000",
  "PI AO-MaxVolts": "5.0000",
  "640 AO-IOChannel": "Dev1/ao6",
  "555 AO-TriggerSequenceLength": "1000",
  "Objective-Description": "Olympus Objective Turret",
  "Prime BSI-PP  3   ENABLED": "Yes",
  "XLIGHT Emission Wheel-Label": "647/57",
  "COM3-Parity": "Even",
  "405-State": "0",
  "520 Shutter-Volts": "0.0000",
  "405-Name": "DA Shutter",
  "DA Z Stage-Stage Low Position(um)": "0.0000",
  "OlympusHub-Port": "COM3",
  "Shutter1-Description": "Shutter Number 1",
  "XLIGHT Dichroic-Name": "XLIGHT Dichroic",
  "LudlShutter-LudlDeviceNumberShutter": "1",
  "LudlController-Version": "Version no. :      8.400   MAC5000 Interface with USB  ",
  "PI AO-TriggerSampleRate": "100000",
  "Core-Galvo": "",
  "Position": "Default",
  "CameraChannelIndex": 0,
  "SliceIndex": 30,
  "Core-Focus": "DA Z Stage",
  "445 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-SupportsTriggering": "0",
  "FrameIndex": 0,
  "COM6-BaudRate": "9600",
  "405 AO-Demo": "No",
  "TransmittedLamp-State": "1",
  "LightPath-ClosedPosition": "",
  "Condenser-Label": "Position-2",
  "520 AO-TriggerSampleRate": "100000",
  "COM4-Parity": "None",
  "Core-ImageProcessor": "",
  "520 AO-AutoDetectedOutputPort": "Dev1/ao3",
  "Prime BSI-Timing-ExposureTimeNs": "10001000.0000",
  "XLIGHT Spin motor-Name": "XLIGHT Spin motor",
  "Prime BSI-ShutterCloseDelay": "0",
  "405 AO-Sequenceable": "1",
  "528 Shutter-Volts": "0.0000",
  "COM7-Description": "Serial port driver (boost:asio)",
  "OlympusHub-Version": "V02.01.01,V01.02.01,V01.03.01",
  "445 Shutter-Block voltage": "false",
  "Core-AutoShutter": "1",
  "COM7-DelayBetweenCharsMs": "0.0000",
  "445 Shutter-SupportsTriggering": "0",
  "PI AO-Description": "NI DAC",
  "Prime BSI-Color": "OFF",
  "TransmittedLamp-ClosedPosition": "",
  "Core-XYStage": "XYStage",
  "Prime BSI-PP  3   THRESHOLD": "85",
  "Shutter1-State": "0",
  "PI AO-MinVolts": "0.0000",
  "528 AO-Sequenceable": "1",
  "528 Shutter-Name": "AnalogIO",
  "405 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "640 AO-AutoDetectedOutputPort": "Dev1/ao6",
  "405 Shutter-Description": "NI DAC",
  "405 Shutter-IOChannel": "Dev1/ao7",
  "Core-AutoFocus": "",
  "470 Shutter-Volts": "0.0000",
  "Objective-State": "2",
  "640 Shutter-Description": "NI DAC",
  "640 AO-MinVolts": "0.0000",
  "BitDepth": 16,
  "Slice": 30,
  "LudlController-Description": "Ludl Controller (Mac 2000/5000)",
  "Prime BSI-PP  1 DESPECKLE BRIGHT HIGH": "DESPECKLE BRIGHT HIGH",
  "PI AO-AutoDetectedOutputPort": "Dev1/ao14",
  "470 AO-TriggerInputLine": "/Dev1/PFI0",
  "COM4-Verbose": "1",
  "COM3-Fast USB to Serial": "Enable",
  "Prime BSI-ClearMode": "Auto",
  "PI AO-Volts": "2.5000",
  "Condenser-State": "1",
  "555 Shutter-SupportsTriggering": "0",
  "Core-Shutter": "LudlShutter",
  "528 AO-TriggerSequenceLength": "1000",
  "XLIGHT Hub-Port": "COM6",
  "Prime BSI-ActualInterval-ms": "57.4500",
  "PI AO-IOChannel": "Dev1/ao14",
  "520 AO-MaxVolts": "5.0000",
  "520 Shutter-Description": "NI DAC",
  "ElapsedTime-ms": 399157,
  "640 Shutter-Sequenceable": "1",
  "PI AO-Name": "AnalogIO",
  "470 Shutter-Description": "NI DAC",
  "445-State": "0",
  "Frame": 0,
  "520-Name": "DA Shutter",
  "ManualFocus-Description": "Manual Focus (Z-Drive)",
  "Prime BSI-PP  0 DESPECKLE BRIGHT LOW": "DESPECKLE BRIGHT LOW",
  "Prime BSI-AcquisitionMethod": "Callbacks",
  "PositionName": "Pos0_002_001",
  "XLIGHT Spin motor-Label": "On (spinning)",
  "640 AO-TriggerSampleRate": "100000",
  "520 Shutter-SupportsTriggering": "0",
  "Prime BSI-CircularBufferEnabled": "ON",
  "Height": 2048,
  "555 AO-TriggerInputLine": "/Dev1/PFI0",
  "470 Shutter-TriggerSampleRate": "100000",
  "Objective-Use Safe Position": "1",
  "555 AO-Demo": "No",
  "LudlController-TransmissionDelay": "0",
  "COM6-Handshaking": "Off",
  "Prime BSI-PP  5   LAMBDA": "26",
  "FilterTurretOLYMPUS-Description": "Fluorescence Filter Cubes",
  "445 Shutter-Name": "AnalogIO",
  "COM3-Name": "COM3",
  "445 Shutter-TriggerSampleRate": "100000",
  "LudlController-Reset": "Operate",
  "520 Shutter-Name": "AnalogIO",
  "470 AO-Name": "AnalogIO",
  "XLIGHT Hub-1-Description": "XLIGHT hub",
  "640 Shutter-MinVolts": "0.0000",
  "Prime BSI-FullWellCapacity": "45000",
  "COM3-DelayBetweenCharsMs": "0.0000",
  "PixelType": "GRAY16",
  "Prime BSI-PP  2   ENABLED": "Yes",
  "Prime BSI-PP  7 Reset": "No",
  "640 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-ChipName": "GS2020",
  "Prime BSI-Trigger-Expose Out-Mux": "1",
  "COM7-Name": "COM7",
  "528 AO-TriggerInputLine": "/Dev1/PFI0",
  "640 Shutter-SupportsTriggering": "0",
  "COM7-DataBits": "8",
  "Condenser-Description": "Transmitted Light Condenser",
  "520 AO-Demo": "No",
  "470 AO-AutoDetectedOutputPort": "Dev1/ao2",
  "445 AO-IOChannel": "Dev1/ao1",
  "Prime BSI-Timing-PreTriggerDelayNs": "12937600.0000",
  "Prime BSI-PP  1   ENABLED": "Yes",
  "Prime BSI-TransposeMirrorX": "0",
  "ManualFocus-FarLimit": "0.0100",
  "Prime BSI-TransposeMirrorY": "0",
  "XLIGHT Disk slider-Name": "XLIGHT Disk slider",
  "COM6-Name": "COM6",
  "405 Shutter-Sequenceable": "1",
  "445 Shutter-MinVolts": "0.0000",
  "FilterTurretOLYMPUS-ClosedPosition": "",
  "528 AO-Demo": "No",
  "COM6-Fast USB to Serial": "Disable",
  "445 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-TransposeCorrection": "0",
  "405 Shutter-AutoDetectedOutputPort": "Dev1/ao7",
  "528 Shutter-TriggerSampleRate": "100000",
  "COM7-AnswerTimeout": "500.0000",
  "405 AO-Volts": "0.0000",
  "555 AO-IOChannel": "Dev1/ao5",
  "COM7-Handshaking": "Off",
  "528-State": "0",
  "640-Name": "DA Shutter",
  "640 Shutter-AutoDetectedOutputPort": "Dev1/ao13",
  "445 Shutter-AutoDetectedOutputPort": "Dev1/ao8",
  "Prime BSI-Gain": "1-HDR",
  "FilterTurretOLYMPUS-Label": "Position-6",
  "405 Shutter-TriggerSequenceLength": "1000",
  "640 Shutter-Block voltage": "false",
  "528 Shutter-IOChannel": "Dev1/ao11",
  "Prime BSI-ClearCycles": "2",
  "555 Shutter-Demo": "No",
  "XYStage-StepSizeX_um": "1.0000",
  "640 AO-Name": "AnalogIO",
  "Objective-Safe Position": "100.0000",
  "PI AO-Sequenceable": "1",
  "470 AO-Sequenceable": "1",
  "OlympusHub-Model": "IX2",
  "Prime BSI-Exposure": "10.00",
  "Prime BSI-ExposeOutMode": "Rolling Shutter",
  "520 Shutter-MinVolts": "0.0000",
  "XLIGHT Hub-1-Port": "COM6",
  "COM6-Parity": "None",
  "470 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "COM7-Parity": "None",
  "640 AO-TriggerSequenceLength": "1000",
  "520 AO-Sequenceable": "1",
  "Prime BSI-Description": "PVCAM API device adapter",
  "405 Shutter-Block voltage": "false",
  "520 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "555 AO-TriggerSampleRate": "100000",
  "Prime BSI-CircularBufferAutoSize": "ON",
  "Objective-Label": "40x",
  "555 Shutter-Sequenceable": "1",
  "640 Shutter-Volts": "0.0000",
  "LudlController-Name": "LudlController",
  "ManualFocus-NearLimit": "30000.0000",
  "555 Shutter-Name": "AnalogIO",
  "XLIGHT Spin motor-State": "1",
  "445 AO-Demo": "No",
  "470 AO-IOChannel": "Dev1/ao2",
  "Prime BSI-ShutterOpenDelay": "0",
  "COM7-StopBits": "2",
  "555-State": "0",
  "Prime BSI-Offset": "100",
  "COM3-AnswerTimeout": "500.0000",
  "520 AO-Name": "AnalogIO",
  "XLIGHT Dichroic-Description": "XLIGHT Dichroic filter",
  "555 AO-SupportsTriggering": "0",
  "COM7-Fast USB to Serial": "Disable",
  "Prime BSI-PP  2   MIN ADU AFFECTED": "200",
  "XLIGHT Emission Wheel-Name": "XLIGHT Emission Wheel",
  "520 Shutter-Block voltage": "false",
  "Prime BSI-Timing-PostTriggerDelayNs": "11200.0000",
  "640-DA Device": "640 Shutter",
  "640 AO-SupportsTriggering": "0",
  "470-Description": "DA device that is used as a shutter",
  "XLIGHT Emission Wheel-State": "7",
  "528 AO-TriggerSampleRate": "100000",
  "DA Z Stage-Stage High Voltage": "5.0000",
  "405 Shutter-Demo": "No",
  "LightPath-Description": "Light Path Prism",
  "528 AO-AutoDetectedOutputPort": "Dev1/ao4",
  "OlympusHub-Description": "Olympus Hub",
  "520 AO-MinVolts": "0.0000",
  "Prime BSI-PP  3 DESPECKLE DARK HIGH": "DESPECKLE DARK HIGH",
  "PixelSizeUm": 0.16,
  "528 AO-MaxVolts": "5.0000",
  "445 Shutter-MaxVolts": "5.0000",
  "640 AO-Block voltage": "false",
  "555 AO-Name": "AnalogIO",
  "528 Shutter-TriggerSequenceLength": "1000",
  "COM4-DataBits": "8",
  "520 Shutter-Sequenceable": "1",
  "405 Shutter-Volts": "0.0000",
  "COM3-DataBits": "8",
  "DA Z Stage-Stage High Position(um)": "220.0000",
  "470 AO-Demo": "No",
  "555 AO-Sequenceable": "1",
  "Condenser-ClosedPosition": "",
  "Prime BSI-ReadoutRate": "100MHz 16bit",
  "Binning": "1x1",
  "405 Shutter-SupportsTriggering": "0",
  "555 AO-Block voltage": "false",
  "528 AO-SupportsTriggering": "0",
  "520 Shutter-TriggerSampleRate": "100000",
  "470 Shutter-Name": "AnalogIO",
  "Shutter1-Name": "Shutter1",
  "COM4-Description": "Serial port driver (boost:asio)",
  "COM3-Description": "Serial port driver (boost:asio)",
  "520 Shutter-IOChannel": "Dev1/ao10",
  "Prime BSI-PP  4   ENABLED": "Yes",
  "Prime BSI-PreampDelay": "0",
  "405 AO-Block voltage": "false",
  "405 Shutter-Name": "AnalogIO",
  "XYStage-TransposeMirrorY": "0",
  "445 AO-AutoDetectedOutputPort": "Dev1/ao1",
  "XPositionUm": 56597,
  "XYStage-TransposeMirrorX": "0",
  "COM6-DataBits": "8",
  "OlympusHub-Name": "OlympusHub",
  "470-DA Device": "470 Shutter",
  "640 AO-TriggerInputLine": "/Dev1/PFI0",
  "528 Shutter-Block voltage": "false",
  "FileName": "img_000000000_P-DIC_030.tif",
  "528 Shutter-Description": "NI DAC",
  "XYStage-Acceleration": "100",
  "555 Shutter-Description": "NI DAC",
  "LightPath-Name": "LightPath",
  "445 AO-Description": "NI DAC",
  "470 AO-Volts": "0.0000",
  "ZPositionUm": 125,
  "528-DA Device": "528 Shutter",
  "640 AO-Description": "NI DAC",
  "Channel": "P-DIC",
  "XLIGHT Excitation Wheel-Label": "Quad",
  "470 Shutter-Sequenceable": "1",
  "528 Shutter-Demo": "No",
  "405 Shutter-MinVolts": "0.0000",
  "Prime BSI-CircularBufferFrameCount": "16",
  "528 Shutter-AutoDetectedOutputPort": "Dev1/ao11",
  "Prime BSI-PP  5   GAIN": "100",
  "LightPath-Label": "Side Port",
  "XLIGHT Excitation Wheel-Description": "XLIGHT Excitation Wheel Position",
  "640 Shutter-MaxVolts": "5.0000",
  "COM6-Description": "Serial port driver (boost:asio)",
  "555 AO-MinVolts": "0.0000",
  "640 Shutter-Demo": "No",
  "DA Z Stage-DA Device": "PI AO",
  "555 Shutter-TriggerSequenceLength": "1000",
  "Camera": "",
  "ManualFocus-FocusSensitivity": "100",
  "Prime BSI-PMode": "Normal",
  "445 AO-Sequenceable": "1",
  "Prime BSI-TransposeXY": "0",
  "Prime BSI-PP  4   MIN ADU AFFECTED": "200",
  "520 AO-SupportsTriggering": "0",
  "XLIGHT Hub-Name": "XLIGHT Hub",
  "445 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "XYStage-StepSizeY_um": "1.0000",
  "PI AO-Block voltage": "false",
  "520 AO-IOChannel": "Dev1/ao3",
  "Prime BSI-PP  6   ENABLED": "No",
  "470 Shutter-Demo": "No",
  "555 AO-MaxVolts": "5.0000",
  "520-DA Device": "520 Shutter",
  "LudlShutter-Name": "LudlShutter",
  "405 AO-Name": "AnalogIO",
  "405 AO-TriggerSampleRate": "100000",
  "XLIGHT Dichroic-State": "2",
  "NextFrame": 0,
  "ManualFocus-Position": "8394.4400",
  "528-Description": "DA device that is used as a shutter",
  "TransmittedLamp-Label": "On",
  "445 Shutter-Sequenceable": "1",
  "555 AO-AutoDetectedOutputPort": "Dev1/ao5",
  "COM6-StopBits": "1",
  "PI AO-TriggerInputLine": "/Dev1/PFI0",
  "Time": "2019-12-16 03:29:02 -0500",
  "405 AO-IOChannel": "Dev1/ao0",
  "COM7-Verbose": "1",
  "COM4-Name": "COM4",
  "COM4-BaudRate": "9600",
  "445 Shutter-Description": "NI DAC",
  "640-State": "0",
  "470 AO-Block voltage": "false",
  "528 AO-Volts": "0.0000",
  "640 AO-MaxVolts": "5.0000",
  "Prime BSI-MetadataEnabled": "No",
  "445 AO-Block voltage": "false",
  "520-Description": "DA device that is used as a shutter",
  "Prime BSI-PreampOffLimit": "10000",
  "COM6-Verbose": "0",
  "555 Shutter-Block voltage": "false",
  "445 AO-TriggerSequenceLength": "1000",
  "520 AO-Block voltage": "false",
  "Prime BSI-TriggerMode": "Internal Trigger",
  "405 AO-TriggerInputLine": "/Dev1/PFI0",
  "ChannelIndex": 4,
  "Prime BSI-SMARTStreamingValues[ms]": "10.000;20.000;30.000;40.000",
  "445 AO-MinVolts": "0.0000",
  "COM7-BaudRate": "9600",
  "Core-TimeoutMs": "5000",
  "470 Shutter-TriggerSequenceLength": "1000",
  "Prime BSI-Timing-ClearingTimeNs": "0.0000",
  "640 Shutter-TriggerInputLine": "/Dev1/PFI0",
  "Prime BSI-SerialNumber": "A18J204029",
  "555-Description": "DA device that is used as a shutter",
  "Prime BSI-Timing-ReadoutTimeNs": "22937000.0000",
  "Prime BSI-Binning": "1x1",
  "Prime BSI-PP  1   THRESHOLD": "115",
  "Width": 2048,
  "445 AO-SupportsTriggering": "0",
  "TransmittedLamp-Name": "",
  "DA Z Stage-Description": "ZStage controlled with voltage provided by a DA board",
  "470 AO-SupportsTriggering": "0",
  "COM3-StopBits": "2",
  "528 Shutter-MinVolts": "0.0000",
  "COM3-Verbose": "1",
  "Prime BSI-PP  5   ENABLED": "No",
  "640 AO-Volts": "0.0000",
  "FilterTurretOLYMPUS-State": "5",
  "528-Name": "DA Shutter",
  "470 Shutter-IOChannel": "Dev1/ao9",
  "OlympusHub-Control": "Manual + Computer",
  "520 Shutter-Demo": "No",
  "XLIGHT Hub-Description": "XLIGHT hub",
  "555 Shutter-IOChannel": "Dev1/ao12",
  "XYStage-Description": "Prior XY stage driver adapter",
  "Prime BSI-PixelType": "16bit",
  "Prime BSI-Y-dimension": "2048",
  "Prime BSI-Trigger Timeout (secs)": "10",
  "555 AO-Description": "NI DAC",
  "COM4-Handshaking": "Off",
  "XLIGHT Excitation Wheel-State": "0",
  "405 AO-SupportsTriggering": "1",
  "XYStage-SCurve": "100",
  "528 AO-Name": "AnalogIO",
  "405 AO-TriggerSequenceLength": "1000",
  "LudlController-Port": "COM7",
  "XLIGHT Emission Wheel-Description": "XLIGHT Emission Wheel Position",
  "555 AO-Volts": "0.0000",
  "405 Shutter-TriggerSampleRate": "100000",
  "COM4-AnswerTimeout": "500.0000",
  "YPositionUm": -4749.528,
  "445 AO-Name": "AnalogIO",
  "ManualFocus-FocusWheel": "Off",
  "555 Shutter-Volts": "0.0000",
  "XLIGHT Hub-1-Name": "XLIGHT Hub",
  "COM6-AnswerTimeout": "5000.0000",
  "528 AO-IOChannel": "Dev1/ao4",
  "LudlShutter-State": "0",
  "DA Z Stage-Position": "110.0000",
  "445 AO-Volts": "0.0000",
  "XLIGHT Excitation Wheel-Name": "XLIGHT Excitation Wheel",
  "470 AO-TriggerSampleRate": "100000",
  "Prime BSI-PP  5   OFFSET": "25",
  "TransmittedLamp-Voltage": "8.7000",
  "COM3-BaudRate": "19200",
  "Prime BSI-FirmwareVersion": "23.22",
  "COM4-Fast USB to Serial": "Disable",
  "470 Shutter-AutoDetectedOutputPort": "Dev1/ao9"
}
}